New Microcapacitors Break Energy Density and Power Barriers

Lawrence Berkeley National Laboratory scientists have developed microcapacitors with ultrahigh energy and power density, paving the way for on-chip energy storage in electronic devices. Many readers have seen the populations of capacitors installed to computer motherboards and other power-intensive silicon chip circuit boards. The findings, published in the journal Nature, pave the way for advanced on-chip energy storage and power delivery in next-generation electronics.

The crystalline films are made from a mix of HfO2 and ZrO2 grown by atomic layer deposition, using standard materials and techniques from industrial chip fabrication. Depending on the ratio of the two components, the films can be ferroelectric, where the crystal structure has a built-in electric polarization, or antiferroelectric, where the structure can be nudged into a polar state by applying an electric field.

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